|
| related topics |
| {photon, photons, single} |
| {light, field, probe} |
| {wave, scattering, interference} |
| {classical, space, random} |
| {state, phys, rev} |
| {cos, sin, state} |
| {operator, operators, space} |
| {state, states, entangled} |
| {phase, path, phys} |
| {energy, gaussian, time} |
| {state, states, coherent} |
| {qubit, qubits, gate} |
| {entanglement, phys, rev} |
| {algorithm, log, probability} |
| {time, systems, information} |
| {equation, function, exp} |
| {time, wave, function} |
|
Quantum Interferometric Optical Lithography: Exploiting Entanglement to
Beat The Diffraction Limit
Agedi N. Boto, Pieter Kok, Daniel S. Abrams, Samuel L. Braunstein, Colin P. Williams, Jonathan P. Dowling
abstract: Classical, interferometric, optical lithography is diffraction limited to
writing features of a size lambda/2 or greater, where lambda is the optical
wavelength. Using nonclassical photon number states, entangled N at a time, we
show that it is possible to write features of minimum size lambda/(2N) in an
N-photon absorbing substrate. This result surpasses the usual classical
diffraction limit by a factor of N. Since the number of features that can be
etched on a two-dimensional surface scales inversely as the square of the
feature size, this allows one to write a factor of N^2 more elements on a
semiconductor chip. A factor of N = 2 can be achieved easily with entangled
photon pairs generated from optical parametric downconversion. It is shown how
to write arbitrary 2D patterns by using this method.
- oai_identifier:
- oai:arXiv.org:quant-ph/9912052
- categories:
- quant-ph
- comments:
- 9 pages, 2 figures
- doi:
- 10.1103/PhysRevLett.85.2733
- arxiv_id:
- quant-ph/9912052
- journal_ref:
- Phys. Rev. Lett. 85, 2733 (2000)
- created:
- 1999-12-10
- updated:
- 2000-05-03
Full article ▸
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